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| Mini-SEM SNE 4500M |
* 최대배율 10만배 구현(100x~100,000x)
* 고 심도, 고 해상도의 수준높은 영상제공 가능
* Mini-SEM 5축 Stage 구성(Tilt 구현)
X,Y(40mm), R(360˚), Tilt(45˚), Z(0~35mm)
* Variable Aperture(30,50,100,200㎛) 장착에 따른
* Beam Spot Size 조정으로 고 분해능 영상구현
* 자동화된 (Focus, Contrast,Contrast/Brightness,
Spot Size, Stigmator) 기능 지원
* 마우스 조작으로 간편하고 다양한 이미지 측정 및 분석
* 폭 넓은 Chamber 구성으로 다양한 시료분석 가능
EDS, BSE, Motorized Stage 등 다양한 확장성
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Application
 금속 / 재료소재 |
환경 / 에너지 |
- 금속소재, 세라믹, 제약, 섬유
- 미세 결정입자 및 형태, 구조 |
- Solar Cell, 환경공학, 2차 전지 |
| 반도체 / MEMS |
바이오 / 의료 |
- Wafer, Bonding Wire, LED,
Nano tech
- CNT (Carbon Nano Tube),
Micro-Pattern |
- 동·식물, 생물, 박테리아, 화장품 |
| 국방과학 및 교육 |
Specification
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Model |
SNE-4500M |
| Electron system |
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| Resolution |
5nm (30kV, SE Image)
20nm ((30kV, BSE Image) |
| Magnification |
30x ~ 100,000x |
| Accelerating Voltage |
5~30kV (5 / 10 / 15 / 20 / 30 . 5 Steps) |
| Signal Detection |
Secondary Electron Image(SEI)
· BSEI(Option) |
| Observation mode |
Standard mode |
| Electron Gun |
Pre-centered Tungsten Filament Cartridge |
| Lens System |
Two-stage Electromagnetic Condenser Lens
One-stage Electromagnetic Objective Lens |
| Stage system |
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| Stage Traverse |
5-axis System
· X, Y-axis : 40mm / R-axis : 360°
T-axis : 0 to 45°, Z-axis : 0 to 35mm
· Image Shift : ±100㎛ |
| Max. Sample Size |
80mm in Diameter x 35mm in Height |
| Iamge system |
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| Frame Memory |
High Speed Mode (320×240) : 10 Frame / sec (Preview)
Low Speed Mode (640×480) : 1 Frame / sec
Photo Mode1 (1280×960) : 1 Frame / sec
Photo Mode2 (2560×1920) : 1 Frame / sec
Sampling Photo mode3 : 1 Frame / min |
| Automation Function |
Auto Focus, Auto Stigmator Auto Contrast & Brightness |
| Image Format |
BMP, JPG, PNG |
| Data display |
Magnification, Detector Type, Accelerating Voltage, Vacuum mode, Logo(text), Date and time, Micron marker |
| Vacuum System |
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| Vacuum mode |
High Vacuum System |
| Vacuum Pump |
Rotary Pump + Turbo Molecular Pump [Full Automation System] |
| Control system |
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| OS |
Microsoft Windows? 7 |
| CPU |
Intel? CoreTM i5 |
| Memory / HDD |
2GB / 500GB |
| Interface connector |
USB 2.0 |
| Dimensions and weight |
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| Main Unit |
390(W)x330(D)x560(H)mm, 98kg
390(W)x310(D)x560(H)mm, 18kg
(Controller) |
| Installation rooom |
Room temperature : 15℃~30℃ / Humidity : 70% or less / Electric power : Single phase 100~240 AC, 1KW, 50/60Hz | |
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